The Impact of Externally Applied Mechanical Stress on Analog and RF Performances of SOI MOSFETs
DOI:
https://doi.org/10.26636/jtit.2009.4.957Keywords:
cutoff frequency fT, intrinsic gain, mechanical stress, piezoresistance coefficiet, SOI MOSFETAbstract
This paper presents a complete study of the impact of mechanical stress on the performance of SOI MOSFETs.This investigation includes dc, analog and RF characteristics.Parameters of a small-signal equivalent circuit are also extracted as a function of applied mechanical stress. Piezoresistance coefficient is shown to be a key element in describing the enhancement in the characteristics of the device due to mechanical stress.
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