Correlation between electric parameters of carbon layers and their capacity for field emission

Authors

  • Ryszard Gronau
  • Jan Szmidt
  • Elżbieta Czerwosz

DOI:

https://doi.org/10.26636/jtit.2007.3.826

Keywords:

carbon layers, diamond-like carbon (DLC), field emission, RF PCVD, AFM, capacitance-voltage (C-V), currentvoltage (I-V)

Abstract

The aim of this work is to study a possibility of field electron emission from carbon layers produced by radio frequency plasma chemical vapor deposition (RF PCVD) method. A correlation between electric parameters of the layers and the ability to produce electron emission is also studied through material (AFM) and electrical (C-V, I-V) characterization of the obtained layers. It is demonstrated that the layers deposited with the highest self-bias exhibit the highest capacity for electron emission.

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Published

2007-09-30

Issue

No. 3 (2007)

Section

ARTICLES FROM THIS ISSUE

License

Copyright (c) 2023 Journal of Telecommunications and Information Technology

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.

How to Cite

[1]
R. Gronau, J. Szmidt, and E. Czerwosz, “Correlation between electric parameters of carbon layers and their capacity for field emission”, JTIT, vol. 29, no. 3, pp. 37–38, Sep. 2007, doi: 10.26636/jtit.2007.3.826.