Diagnostics of micro- and nanostructure using the scanning probe microscopy

Authors

  • Teodor Paweł Gotszalk Wrocław University of Science and Technology image/svg+xml
  • Paweł Janus Institute of Electron Technology, Poland
  • Andrzej Marek Marendziak Wrocław University of Science and Technology image/svg+xml
  • Piotr Czarnecki Wrocław University of Science and Technology image/svg+xml
  • Jacek Mikołaj Radojewski Wrocław University of Science and Technology image/svg+xml
  • Roman F. Szeloch Wrocław University of Science and Technology image/svg+xml
  • Piotr B. Grabiec Institute of Electron Technology, Poland
  • Ivo W. Rangelow University of Kassel image/svg+xml

DOI:

https://doi.org/10.26636/jtit.2005.1.293

Keywords:

scannig probe microscopy, microsystem, nanofabrication

Abstract

In this paper we summarize the results of our research concerning the diagnostics of micro- and nanostructure with scanning probe microscopy (SPM). We describe the experiments performed with one of the scanning probe microscopy techniques enabling also insulating surfaces to be investigated, i.e., atomic force microscopy (AFM). We present the results of topography measurements using both contact and non-contact AFM modes, investigations of the friction forces that appear between the microtip and the surface, and experiments connected with the thermal behaviour of integrated circuits, carried out with the local resolution of 20 nm.

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References

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Submitted

2023-04-09

Published

2005-03-30

Issue

No. 1 (2005)

Section

RESEARCH ARTICLES

License

Copyright (c) 2005 Journal of Telecommunications and Information Technology

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.

How to Cite

[1]
T. P. Gotszalk, “Diagnostics of micro- and nanostructure using the scanning probe microscopy”, JTIT, vol. 19, no. 1, pp. 41–46, Mar. 2005, doi: 10.26636/jtit.2005.1.293.

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