Silicon TCD for the methane and carbon monoxide detection

Authors

  • Jan M. Łysko Institute of Electron Technology, Poland
  • Bogdan Latecki Institute of Electron Technology, Poland
  • Marek W. Nikodem Institute of Electron Technology, Poland
  • Marianna Górska Institute of Electron Technology, Poland
  • Jerzy Mróz The Research and Development Center for Electrical Engineering and Automation in Mining (EMAG), Poland
  • Marcin Małachowski The Research and Development Center for Electrical Engineering and Automation in Mining (EMAG), Poland

DOI:

https://doi.org/10.26636/jtit.2005.1.286

Keywords:

detector, silicon, gas mixture

Abstract

Analytical model, design principles, technology and test results concerning a thermal conductivity detector (TCD) are presented. Prototype TCD units fabricated using the standard silicon IC VLSI and MEMS techniques are reported. The detectors are integrated with gas separation columns and micro-valve dosing systems. Initial tests were carried out in a gas mixture containing methane, carbon monoxide, oxygen, hydrogen and nitrogen.

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References

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Submitted

2023-04-09

Published

2005-03-30

Issue

No. 1 (2005)

Section

RESEARCH ARTICLES

License

Copyright (c) 2005 Journal of Telecommunications and Information Technology

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.

How to Cite

[1]
J. M. Łysko, B. Latecki, M. W. Nikodem, M. Górska, J. Mróz, and M. Małachowski, “Silicon TCD for the methane and carbon monoxide detection”, JTIT, vol. 19, no. 1, pp. 94–97, Mar. 2005, doi: 10.26636/jtit.2005.1.286.

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