Integrated gas chromatograph
DOI:
https://doi.org/10.26636/jtit.2005.1.296Keywords:
portable gas chromatograph, integrated injectors, silicon micromechanicsAbstract
A portable gas chromatograph with integrated micromachined flushed injector and thermal mass detector (TCD) has been developed. The silicon/glass injector operates in a fixed volume (2 x 7 μL) or electronically operated mode. An integrated, pneumatically operated, fast cross-valve is applied in the injector. The TCD detector consists of two Pt microheaters and thermoresistors packaged in a silicon/glass micromachined chip. The temperature of two capillary molecular sieve separation columns is controlled by a thick-film heater fabricated on polyimide foil. The chromatograph is equipped with two 16-bits microprocessors communicating with the external portable PC. The instrument may operate in the on-line continuous analysis mode.
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Copyright (c) 2005 Journal of Telecommunications and Information Technology

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