Analysis of errors in on-wafer measurements due to multimode propagation in CB-CPW
DOI:
https://doi.org/10.26636/jtit.2005.2.313Keywords:
on-wafer measurements, multimode propagation, error analysis, conductor-backed coplanar waveguide (CBCPW), microstrip-like mode, numerical electromagnetic analysis, on-wafer probe, calibration, de-embedding, monolithic microwave integrated circuit (MMIC)Abstract
We study for the first time errors in on-wafer scattering parameter measurements caused by the parasitic microstrip-like mode propagation in conductor-backed coplanar waveguide (CB-CPW). We determine upper bound for these errors for typical CPW devices such as a matched load, an open circuit, and a transmission line section. To this end, we develop an electromagnetic-simulations-based multimode three-port model for the transition between an air-coplanar probe and the CB-CPW. Subsequently, we apply this model to examine errors in the device S parameters de-embedded from measurements affected by the parasitic MSL mode. Our analysis demonstrates that the multimode propagation in CB-CPW may significantly deteriorate the S-parameters measured on wafer.
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