Monte Carlo method used for a prognosis of selected technological parameters
DOI:
https://doi.org/10.26636/jtit.2007.3.838Keywords:
DFSS, MC method, PVD, contacts, Excel randomizingAbstract
In this paper a smart modeling approach for realistic simulation of selected technological parameters is presented. The technology of making contacts with plasma vapor deposition (PVD) method has been chosen for this purpose. The analysis is based on the Monte Carlo (MC) method and uses the Excel worksheet – the simplest tool, easily accessible to anyone. The statistic parameters are calculated and discussed as we introduce this experiment to demonstrate the advantages of design for six sigma (DFSS).
Downloads
References
[1] K. Simon, "What is DFSS?", Isixsigma Mag, 2004, http://www.isixsigma.com/library
View in Google Scholar
[2] C. Frangakis, D. Rubin, and X. Zhou, "Clustered encouragement designs with individual noncompliance: Bayesian inference with randomization, and application to advance directive forms", Biostatistics, no. 3, pp. 147-164, 2001.
View in Google Scholar
[3] C. W. Gardiner, Handbook of Stochastic Methods for Physics, Chemistry and The Natural Sciences. Berlin [etc.]: Springer, 2004.
View in Google Scholar
[4] "Innovative stochastic algorithms", http://members.shaw.ca
View in Google Scholar
[5] Cienkie warstwy metaliczne. Warsaw-Wrocław: PWN, 1974 (in Polish).
View in Google Scholar
[6] V. Shashkin et al., "Microstructure and properties of aluminum contacts formed on GaAs (100) by low pressure CVD with dimethylethylamine alane source", J. Electron. Mater., vol. 30, no. 8, pp. 980-987, 2001.
View in Google Scholar
[7] Procesy technologiczne w elektronice półprzewodnikowej. Warsaw: WNT, 1980 (in Polish).
View in Google Scholar
Downloads
Submitted
Published
Issue
Section
License
Copyright (c) 2023 Journal of Telecommunications and Information Technology

This work is licensed under a Creative Commons Attribution 4.0 International License.