Comparison of the barrier height measurements by the Powell method with the φMS measurement results
DOI:
https://doi.org/10.26636/jtit.2005.1.281Keywords:
barrier height, effective contact potential difference, MOS systemAbstract
In this work, we have compared the barrier height measurements carried out using the Powell method with the photoelectric effective contact potential difference (φMS) measurement results. The photoelectric measurements were performed on the samples that were previously applied in the investigation of the influence of stress on the duration of annealing in nitrogen. This paper shows that the results of barrier height measurement using the Powell method differ significantly from the φMS measurement results.
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[1] R. J. Powell, „Photo injection into SiO2: use of optical interference to determine electron and hole contributions”, J. Appl. Phys., vol. 40, p. 5093, 1969.
View in Google Scholar
[2] R. J. Powell, „Interface barrier energy determination from voltage dependence of photoinjected currents”, J. Appl. Phys., vol. 41, p. 2424, 1970.
View in Google Scholar
[3] H. M. Przewłocki and H. Z. Massoud, „Effects of stress annealing in nitrogen on the effective contact-potential difference, charges, and traps at the Si/SiO2 interface of metal-oxide-semiconductor devices”, J. Appl. Phys., vol. 92, pp. 2198-2201, 2002.
View in Google Scholar
[4] H. M. Przewłocki, „The importance, the nature and the measurement methods of the φ MS factor in MOS structures”, Electron Technol., vol. 27, no. 1, pp. 7-42, 1994.
View in Google Scholar
[5] H. M. Przewłocki, „Theory and applications of internal photoemission in the MOS system at low electric fields”, Solid-State Electron., vol. 45, pp. 1241-1250, 2001.
View in Google Scholar
[6] A. Kudła, „Fotoelektryczne metody wyznaczania wysokości barier potencjału w strukturze MOS”, Prace Instytutu Technologii Elektronowej, no. 5-7, pp. 7-115, 1998 (in Polish).
View in Google Scholar
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