Investigations of electron emission from DLC thin films deposited by means of RF PCVD at various self-bias voltages

Authors

DOI:

https://doi.org/10.26636/jtit.2007.3.827

Keywords:

DLC, RF PCVD, Raman spectroscopy, turn-on field, electron emission, effective work function

Abstract

The aim of this paper is to report the results of field emission experiments on undoped, flat diamond-like carbon (DLC) thin films deposited at various self-bias voltages using radio frequency plasma chemical vapor deposition (RF PCVD) technique. It has been observed that the emission properties improve when the absolute value of self-bias voltage becomes higher, e.g., the turn-on field value decreases. The correlation between electron field emission and sp2 content in these films showed improvement of electron emission properties of DLC films for higher amount of sp2 phase.

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References

[1] J. B. Cui, J. Ristein, and L. Ley, "Low-threshold electron emission from diamond", Phys. Rev. B, vol. 60, pp. 16135-16142, 2000.
View in Google Scholar

[2] P. K. Baumann and R. J. Nemanich, "Negative electron affinity effects on H plasma exposed diamond (100) surfaces", Diam. Rel. Mater., vol. 4, pp. 802-805, 1995.
View in Google Scholar

[3] B. B. Pate, "The diamond surface: atomic and electronic structure", Surf. Sci., vol. 165, pp. 83-142, 1990.
View in Google Scholar

[4] H. Kawarada, "Hydrogen-terminated diamond surfaces and interfaces", Surf. Sci. Rep., vol. 26, pp. 205-259, 1996.
View in Google Scholar

[5] R. H. Fowler and L. Nordheim, "Electron emission in intense electric fields", Proc. Roy. Soc. Lon. Ser. A., vol. 119, no. 781, pp. 173-181, 1928.
View in Google Scholar

[6] J. Y. Luo, K. S. Liu, J. S. Lee, I. N. Lin, and H. F. Cheng, "The influence of film-to-substrate characteristics on the electron field emission behavior of the diamond films", Diam. Rel. Mater., vol. 7, pp. 704-710, 1998.
View in Google Scholar

[7] J. B. Cui, M. Stammler, J. Ristein, and L. Ley, "Role of hydrogen on field emission from chemical vapor deposited diamond and nanocrystalline diamond powder", J. Appl. Phys., vol. 88, pp. 3667-3674, 2000.
View in Google Scholar

[8] E. Staryga and G. W. Bąk, "Relation between physical structure and electrical properties of diamond-like carbon thin films", Diam. Rel. Mater., vol. 14, pp. 23-34, 2005.
View in Google Scholar

[9] C. E. Nebel, "Electronic properties of CVD diamond", Semicond. Sci. Technol., vol. 18, pp. S1-S11, 2003.
View in Google Scholar

[10] A. V. Karabutov, V. D. Frolov, and V. I. Konov, "Diamond/sp2 bonded carbon structures: quantum well field electron emission?", Diam. Relat. Mater., vol. 10, pp. 840-846, 2001.
View in Google Scholar

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Submitted

2023-06-25

Published

2007-09-30

Issue

No. 3 (2007)

Section

ARTICLES FROM THIS ISSUE

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Copyright (c) 2023 Journal of Telecommunications and Information Technology

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This work is licensed under a Creative Commons Attribution 4.0 International License.

How to Cite

[1]
D. Jarzyńska, Z. Znamirowski, M. Cłapa, and E. Staryga, “Investigations of electron emission from DLC thin films deposited by means of RF PCVD at various self-bias voltages”, JTIT, vol. 29, no. 3, pp. 39–43, Sep. 2007, doi: 10.26636/jtit.2007.3.827.