Firek P, Werbowy A, Szmidt J, Olszyna AR. Properties of Al contacts to Si surface exposed in the course of plasma etching of previously grown nanocrystalline c-BN film. JTIT [Internet]. 2005 Mar. 30 [cited 2026 Jun. 19];19(1):76-80. Available from: https://jtit.pl/jtit/article/view/289