Kociubiński, Andrzej, Mariusz Duk, Tomasz Bieniek, and Paweł Janus. “Modeling, Simulation and Calibration of Silicon Wet Etching”. Journal of Telecommunications and Information Technology 38, no. 4 (December 30, 2009): 65–70. Accessed June 1, 2026. https://jtit.pl/jtit/article/view/974.