KOCIUBIŃSKI, Andrzej; DUK, Mariusz; BIENIEK, Tomasz; JANUS, Paweł. Modeling, Simulation and Calibration of Silicon Wet Etching. Journal of Telecommunications and Information Technology, [S. l.], v. 38, n. 4, p. 65–70, 2009. DOI: 10.26636/jtit.2009.4.974. Disponível em: https://jtit.pl/jtit/article/view/974. Acesso em: 1 jun. 2026.