RUZYLLO, Jerzy. Semiconductor cleaning technology for next generation material systems. Journal of Telecommunications and Information Technology, [S. l.], v. 28, n. 2, p. 44–48, 2007. DOI: 10.26636/jtit.2007.2.807. Disponível em: https://jtit.pl/jtit/article/view/807. Acesso em: 15 dec. 2024.