TARDIF, Franc¸ois; DANEL, Adrien; RACCURT, Olivier. Understanding of wet and alternative particle removal processes in microelectronics: theoretical capabilities and limitations. Journal of Telecommunications and Information Technology, [S. l.], v. 19, n. 1, p. 11–19, 2005. DOI: 10.26636/jtit.2005.1.297. Disponível em: https://jtit.pl/jtit/article/view/297. Acesso em: 12 dec. 2024.