BECK, Romuald B. Ultrathin oxynitride films for CMOS technology. Journal of Telecommunications and Information Technology, Warsaw, Poland, v. 15, n. 1, p. 62–69, 2004. DOI: 10.26636/jtit.2004.1.228. Disponível em: https://jtit.pl/jtit/article/view/228. Acesso em: 13 jun. 2026.