Firek, P., Werbowy, A., Szmidt, J., & Olszyna, A. R. (2005). Properties of Al contacts to Si surface exposed in the course of plasma etching of previously grown nanocrystalline c-BN film. Journal of Telecommunications and Information Technology, 19(1), 76-80. https://doi.org/10.26636/jtit.2005.1.289